MANUFACTURING METHOD OF OPTICAL LOGIC DEVICE

摘要

The method is for manufacturing an optical logic device by applying electric field to a lattice of a multiple quantum well structure so that superior optical modulation characteristic is obtained. The method comprises the steps of: (A) growing a reflection layer (2) and an active region (3) by using MBE process; (B) forming an optical window and forming N-type doping region (4) and a P-type doping region (5) by injecting N-type ion and P-type ion perpendicalar to an active region (3); (C) forming an insulating area (6) to seperate devices electrically; (D) forming contact (7) on a N-type doping region (4) and a P-type region (5); and (G) spraying non-reflecting material on a layer (8).