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发明名称
Verfahren zur Messung der Zwischenschicht-Zustandsdichteverteilung in einer MIS-Struktur
摘要
申请公布号
DE4202619(C2)
申请公布日期
1994.08.18
申请号
DE19924202619
申请日期
1992.01.30
申请人
MITSUBISHI DENKI K.K., TOKIO/TOKYO, JP
发明人
KIMURA, MIKIHIRO, ITAMI, HYOGO, JP
分类号
G01R29/00;G01N27/00;G01R31/26;H01L21/66;(IPC1-7):G01R31/26
主分类号
G01R29/00
代理机构
代理人
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地址
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