Method and device for detecting surface structures

摘要

A method for detecting surface structures operates with a detector element which is capable of bending oscillations. The said detector element is placed in contact with the surface structure of a sample to be detected. A piezoceramic or magnetostrctive vibration exciter provides the detector element with an oscillation pulse. The oscillation behaviour of the detector element after the oscillation pulse is then evaluated and permits conclusions to be drawn about the surface structure of the sample.