Equipment for high-rate cathodic sputtering.,申请号EP19910401433-传众专利搜索

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发明名称	Equipment for high-rate cathodic sputtering.
摘要
申请公布号	EP0461014(B1)	申请公布日期	1994.08.17
申请号	EP19910401433	申请日期	1991.06.03
申请人	SAINT GOBAIN VITRAGE INTERNATIONAL;GLACERIES SAINT ROCH	发明人	DEVIGNE, ROLAND;BEAUFAYS, JEAN-PIERRE
分类号	C23C14/35;H01J37/34;(IPC1-7):C23C14/35	主分类号	C23C14/35
代理机构		代理人
主权项
地址

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