Apparatus and method for cooling semiconductor processing equipment.

摘要

An improved system and apparatus is provided for cooling the energy source used in powering various types of semiconductor processing devices. The improved cooling system uses a solenoid valve which is electrically controlled by the processing equipment during times in which the energy source is on, or during times in which the user manually or automatically programs valve activation. The solenoid valve can be easily and readily retrofitted to any pre-existing processing device which uses an energy source and which can be electrically activated by the processing device or a user interface panel. An activated solenoid valve allows coolant to flow through the energy source in order to maintain optimal performing temperature of the energy source. An inactive valve will reroute coolant away from the energy source to ensure longevity of the system and to minimize condensation upon the energy source electrical components.