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经营范围
发明名称
Mask repair.
摘要
申请公布号
EP0316111(B1)
申请公布日期
1994.08.17
申请号
EP19880310335
申请日期
1988.11.03
申请人
AT&T CORP.
发明人
HARRIOTT, LLOYD RICHARD;VASILE, MICHAEL JOSEPH ROBERT
分类号
G03F1/00;H01L21/027;(IPC1-7):G03F1/00
主分类号
G03F1/00
代理机构
代理人
主权项
地址
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