| 摘要 |
<p>Apparatus for optically inspecting an article, includes an illuminating system, an imaging system, and rotatable polarizing devices including a polarizer (20) in the illuminating system, an analyzer (22) in the imaging system, and a phase compensator (66) in one of the systems. The illuminating system directs the light from the light source to the objective lens (8) along an axis which is parallel to, but is laterally displaced from, the axis of the objective lens (18), such as to illuminate the inspected article (14) with a cone of light (62) which is tilted at an angle relative to the axis (18) of the objective lens to thereby permit contrast enhancement of the illuminated inspected article by the null-ellipsometric effect. <IMAGE></p> |
