| 摘要 |
<p>The invention relates to an absolute pressure sensor of the capacitive type, comprising a first element (2) in which a mobile electrode (4) is made, a second element (6) in which a fixed electrode (8) is made, which fixed electrode is located facing the said mobile electrode (4) and is insulated therefrom, a linkage frame (10) interposed within the first and second elements in order to define an enclosure (12) which is insulated from the external medium and in which a substantially zero pressure prevails, and a reference volume (14) connected with the said enclosure, the said sensor being characterised in that the first element (2) has the configuration of a membrane with substantially constant thickness and in that the said reference volume (14) is made at least partially in the second element (6). <IMAGE></p> |
