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发明名称
VACUUM DEPOSITION DEVICE
摘要
申请公布号
JPH06228743(A)
申请公布日期
1994.08.16
申请号
JP19930015182
申请日期
1993.02.02
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
KUNIEDA TOSHIAKI
分类号
C23C14/28;(IPC1-7):C23C14/28
主分类号
C23C14/28
代理机构
代理人
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