| 摘要 |
PURPOSE:To provide a device for producing ultrapure water low in running cost and in expense for maintening the device in a device for producing an ultrapure water. CONSTITUTION:After a raw water or a waste water is treated with a pretreating device 1 such as a direct filtration equipment, floatation filtration equipment to remove harmful matter such as suspension, iron, manganese, ions and total org. carbons are removed by a low pressure reverse osmosis membrane 2, the ions in a regenerated waste water through the low pressure reverse osmosis membrane 2 are, moreover, removed a by an ion exchange resin membrane 3 to be made ion ultrapure water. A waste water contg. highly concentrated ion generated when ions are removed by the ion exchange resin 3 is supplied to a concentration distillation unit 4 and solidified, and is discarded as a sludge. |
