| 摘要 |
PURPOSE:To provide a lapping device and a lapping method enabling the free change of load, applied to a workpiece, even during operation and improving in such a way that the load is not fluctuated by the vibration of the device. CONSTITUTION:A lapping device 10 is provided with air pressure supply mechanism 20 in addition to workpiece holding mechanism 18 (22, 24, 26, 30). The mechanism 20 is formed of a rotary combined body (48, 50, 52, 54, 56) positioned, at its lower end parts, on the holding holes 30 of a carrier 24 and rotated integrally with the carrier 24, and a fixed combined body (38, 44, 46) with one end part thereof rotatably supporting the upper end part of the rotary combined body and with the other end thereof fixedly connected to external air source so as to transmit air pressure to the lower end part of the rotary combined body through the fixed combined body. A load means 56 is freely expanded/ contracted in the vertical direction by the action of air pressure so as to be brought into contact with a workpiece 28 or separated from the workpiece 28 while making air pressure act upon the workpiece 28. |
