BOAT POSITION DETECTOR OF SEMICONDUCTOR MANUFACTURE DEVICE

摘要

PURPOSE:To enable the position matching of a boat and a transfer machine automatically by providing a dummy plate which can be inserted in or removed from the boat which holds a wafer horizontally at many steps and providing a reflection detection body in either of the dummy plate and wafer transfer machine and a detector in the other of them. CONSTITUTION:A boat 4 which can be inserted into a longitudinal furnace having a reaction pipe of a semiconductor manufacturing device can hold groove wafers which are formed at the predetermined pitch horizontally at many steps. Insertion and removal of wafers into each groove are done by a wafer transfer machine 9 having a handling unit 11. In this case, an optical sensor 17 is provided in front of a slider 14 on which a chuck plate 15 of the transfer machine 9 is mounted. Also, a dummy plate 18 is inserted into the boat 4 in such a way that it can be inserted or removed freely, and a spherical reflection detection body 20 is fixed at an end face which is orthogonal to the optical axis of the optical sensor 17 of the plate 18. A maximum value of quantity of light which is emitted from the optical sensor 17 and reflected by the reflection detection body 20 is computed to detect the position of groove of the boat 4.