发明名称 SHIFTING DEVICE FOR THIN PLATE COMPONENT AND ITS SHIFTING METHOD
摘要 <p>PURPOSE:To provide a more miniaturized shifting device of thin plate components. CONSTITUTION:A shifting device is provided with a shifting stage 12 provided on a device main body 11, a moving table 13 provided on the shifting stage 12, a chuck 14 installed on the shifting stage 12, and a lifter delivering or receiving a thin plate component between carriers mounted on the moving table 13 and the chuck 14. The first carrier mount section 25 mounted with the first carrier and the second carrier mount section 27 mounted with the second carrier are provided on the moving table 13 in parallel.</p>
申请公布号 JPH06227615(A) 申请公布日期 1994.08.16
申请号 JP19930034587 申请日期 1993.01.29
申请人 SONY CORP;SEIWA ENG KK 发明人 KOJIMA AKIRA;MAKINO HARUHIKO;SATOU TOMOHIRO
分类号 B65G1/04;B65G1/00;B65G49/07;H01L21/677;H01L21/68;(IPC1-7):B65G1/04 主分类号 B65G1/04
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