发明名称 |
Masks for applying dots on semiconductor wafers |
摘要 |
A mask and an assembly utilizable in the production of a multiplicity of capacitors on selected regions of a semiconductor wafer includes a shaped, thin sheet of material having spaced-apart holes made therein and at least one recess formed adjacent each of at least two opposite edges thereof, the recess being configured to be engaged by a substantially matching portion of a clamp releasably affixing the mask onto the wafer.
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申请公布号 |
US5338424(A) |
申请公布日期 |
1994.08.16 |
申请号 |
US19920998135 |
申请日期 |
1992.12.29 |
申请人 |
PERSYS TECHNOLOGY LTD. |
发明人 |
DRIMER, GIDEON;GLAZER, ARIE |
分类号 |
C23C14/04;G03F1/16;H01L21/66;H01L23/544;(IPC1-7):C23C15/00 |
主分类号 |
C23C14/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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