发明名称 |
Laterally sensitive accelerometer and method for making |
摘要 |
A micromachined capacitor structure having a first anchor (12) attached to the substrate (24), a tether (13) coupled to the anchor (12) and having a portion free to move in a lateral direction over the substrate (24) in response to acceleration. A tie-bar (14) is coupled to the movable portion of the tether (13), and at least one movable capacitor plate (16) is coupled to the tie bar (13). A first fixed capacitor plate (16) is attached to the substrate (24) laterally overlapping and vertically spaced from the at least one movable capacitor plate (16). |
申请公布号 |
US5337606(A) |
申请公布日期 |
1994.08.16 |
申请号 |
US19920926616 |
申请日期 |
1992.08.10 |
申请人 |
MOTOROLA, INC. |
发明人 |
BENNETT, PAUL T.;GUTTERIDGE, RONALD J.;KOURY, JR., DANIEL N.;MIETUS, DAVID F.;RISTIC, LJUBISA |
分类号 |
G01P15/08;G01P15/125;H01L29/84;(IPC1-7):G01P15/08;H01G7/00 |
主分类号 |
G01P15/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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