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发明名称
METHOD OF PRODUCING BUFFER LAYERS OF CIRCONIUM DIOXIDE
摘要
申请公布号
RU2018192(C1)
申请公布日期
1994.08.15
申请号
SU19925032178
申请日期
1992.03.16
申请人
MINSKIJ RADIOTEKHNICHESKIJ INSTITUT
发明人
LYNKOV LEONID M;SHISHANKOVA ZINAIDA I;KOLOSOVA GALINA V;GLYBIN VASILIJ P
分类号
H01L21/268;(IPC1-7):H01L21/268
主分类号
H01L21/268
代理机构
代理人
主权项
地址
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