| 摘要 |
<p>PURPOSE:To effectively switch a type and to realize a semiconductor manufacturing apparatus having high productivity by transmitting bar code information read at an inlet of the apparatus to a central controller and processing a semi- fabricated product according to judgement of the controller. CONSTITUTION:A manufacturing apparatus 10 has a bar code reader 12a for reading a bar code 103a attached to a semi-fabricated product containing case 102a before processing, a bar code reading controller 13a, a processing state 14 for processing the product and a process controller 15. The apparatus also has a bar code reader 12b for reading a bar code 103b attached to a semi- fabricated product containing case 102b in a semi-fabricated product container 16 after processing, a bar code reading controller 13b, a central controller 20, a communication controller 17 for communicating (data transmission/reception) with a central controller 20. The controller 20 has a communication control unit 21 for communicating with the apparatus 10, an information unit 22 having type information, and a judging unit 23 for judging presence/absence of switching a type of the apparatus.</p> |
