| 摘要 |
PURPOSE:To provide a novel method for fabricating a solid electrolyte oxygen concentration sensor. CONSTITUTION:A lower electrode film 2, a solid electrolyte film 3, and an upper electrode film 4 are formed sequentially on a silicon substrate 1. A pinhole 5 is then made through the lower electrode film 2, the solid electrolyte film 3, and the upper electrode film 4. Furthermore, a sacrifice film 7 is formed on the upper electrode film 4 followed by formation of a hollow wall film 8 covering the sacrifice film 7. Etching is then performed from the rear side of the silicon substrate 1 to the pinhole 5 and the sacrifice film 7 above the upper electrode film 4 is removed by etching through the pinhole 5 thus forming a hollow part 12. |
