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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH06224290(A)
申请公布日期
1994.08.12
申请号
JP19930012423
申请日期
1993.01.28
申请人
SHARP CORP
发明人
YAMANAKA TETSUYA
分类号
H01L21/02;H01L21/76;H01L21/761;H01L29/74;(IPC1-7):H01L21/76
主分类号
H01L21/02
代理机构
代理人
主权项
地址
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