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发明名称
VAPORIZATION COOLING APPARATUS
摘要
申请公布号
JPH06224337(A)
申请公布日期
1994.08.12
申请号
JP19930027331
申请日期
1993.01.22
申请人
YASKAWA ELECTRIC CORP
发明人
SONODA HIRONOBU
分类号
H01L23/44;H01L23/427;(IPC1-7):H01L23/44
主分类号
H01L23/44
代理机构
代理人
主权项
地址
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