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发明名称
FORMATION METHOD FOR WIRING
摘要
申请公布号
JPH06224305(A)
申请公布日期
1994.08.12
申请号
JP19930012174
申请日期
1993.01.28
申请人
NEC CORP
发明人
SUGAI KAZUMI;OKABAYASHI HIDEKAZU
分类号
H01L21/768;H01L21/285;(IPC1-7):H01L21/90
主分类号
H01L21/768
代理机构
代理人
主权项
地址
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