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经营范围
发明名称
CVD DEVICE
摘要
申请公布号
JPH06224128(A)
申请公布日期
1994.08.12
申请号
JP19930031371
申请日期
1993.01.26
申请人
SONY CORP
发明人
SHIGYO SHOICHI;TANAKA TAKEMOTO;TSUCHIYA SHINJI;HAYASHIDA TOMOYUKI
分类号
H01L21/205;(IPC1-7):H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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