| 摘要 |
PURPOSE:To prevent screen deformation by providing a cavity hole on a ceramic green sheet, whereupon a wiring pattern is to be printed and the cavity hole is to be provided, after the process of printing the wiring pattern. CONSTITUTION:A ceramic green sheet 15 is formed on a carrier film 14. Then, a hole 16 to be a via hole is provided and the hole 16 is permitted to penetrate not only the ceramic green sheet 15 but also the carrier film 14. The hole 16 is filled with paste 17 by screen printing. Then, a wiring pattern 18 and a conductive pattern are printed on the ceramic green sheet 15 by screen printing, etc., using the same conductive paste 17. A cavity hole 19 which constitutes the part of a cavity is provided on the ceramic green sheet 15. The cavity hole 19 is permitted to penetrate the carrier film 14. |
