发明名称 X-RAY GENERATION SOURCE
摘要 PURPOSE:To make an excitation laser device compact by observing a sample organism or the like by utilizing a high energy converting efficiency of an X-ray in a 'water window' zone in an X-ray microscope using an X-ray generation source. CONSTITUTION:A laser beam 7 radiated from a laser device 1 is converged by a lens 2 to go through a window 5 to be converged on a solid target 3 in a vacuum container 4. An X-ray generated from plasma generated at a convergence point is radiated directly or through an X-ray optical element on a sample organism 6. The solid target 3 comprises substance to generate the X-ray in a 'water window' wavelength zone, to which elements between an atomic number 31; gallium and an atomic number 42; molyubdenum are applicable. In case yttrium (atomic number 39) is applied for the solid target, its main peak exists in the 'water window' wavelength zone, having less distribution in short wavelength to long wavelength zones. Conversion efficiency from laser energy into the 'water window' zone is high.
申请公布号 JPH06223996(A) 申请公布日期 1994.08.12
申请号 JP19910103725 申请日期 1991.03.25
申请人 AGENCY OF IND SCIENCE & TECHNOL;NIKON CORP 发明人 TOMIE TOSHIHISA;YANO MASAAKI;KONDO HIROYUKI
分类号 H01S3/00;H05G2/00;(IPC1-7):H05G2/00 主分类号 H01S3/00
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