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发明名称
DRIVE MODE SWITCHING DEVICE FOR MOTOR-DRIVEN STAGE
摘要
申请公布号
JPH06222802(A)
申请公布日期
1994.08.12
申请号
JP19930026183
申请日期
1993.01.21
申请人
NIKON CORP
发明人
ISHIKAWA AIICHI
分类号
G05B7/02;(IPC1-7):G05B7/02
主分类号
G05B7/02
代理机构
代理人
主权项
地址
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