摘要 |
<p>PURPOSE:To reduce the distribution difference of electric fields between the pixels at the periphery of a sensor chip and other pixels by forming an earth electrode at the periphery of the face where a pixel electrode is formed. CONSTITUTION:A quadrilateral pixel electrode P is formed at each apex of the matrix constituted of a quadrilateral triangle whose one side lies parallel with the line parallel with the reference level F. Furthermore, an earth electrode E is formed around the four quarters of a group of pigment electrodes. Next, a wafer is cleft along the face of other crystal axis, and a parallelogrammic sensor chip C is cut out, and further sensor chips C are arranged roughly in the shape of a straight line in the line direction of pigments, and as a whole a line sensor is constituted. The line sensor S is shifted at regular pitches in the direction inclined from the perpendicular of the reference level F by a drive mechanism 1, and in each position with every shifting, the data on each pixel are taken in an arithmetic processing unit 2. Hereby, the difference of electric field distribution between the pixel in the position along the end of a chip and other pigments can be lessened.</p> |