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发明名称
Signalübertragungsleitung in Filmschichttechnik
摘要
申请公布号
DE4402082(A1)
申请公布日期
1994.08.11
申请号
DE19944402082
申请日期
1994.01.25
申请人
MITSUBISHI DENKI K.K., TOKIO/TOKYO, JP
发明人
MATSUBAYASHI, HIROTO, ITAMI, HYOGO, JP;NAKAJIMA, YASUHARU, ITAMI, HYOGO, JP;NOTANI, YOSHIHIRO, ITAMI, HYOGO, JP
分类号
H01L21/60;H01B7/08;H01L23/12;H01P3/00;H01P3/08;H05K1/00;H05K1/02;H05K3/46;(IPC1-7):H01L23/64;H01L23/522
主分类号
H01L21/60
代理机构
代理人
主权项
地址
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