Method for examining multidimensional nonhomogeneous structures

摘要

The invention relates to a method for examining multidimensional nonhomogenous structures, the respective volume elements being determined on a point basis differentially in the z direction of the radiator or the transmitting elements, specifically by using transmitter/receiver matrices which have structures with large surfaces and consist of a number of transmitter/receiver elements. The transmitter and receiver elements are arranged in a plane and designed as a flat matrix or line. The transmitter/receiver elements form extremely small units in which the transmitter and receiver can be actuated or read out separately. The transmission intensity and wavelength of the transmitter elements can be varied or else also kept constant. By successive irradiation in a circle around the detector or detectors or by successively moving the transmitter elements around in an annular shape using the multiplex method, the stray light intensity focus which arises with simultaneous annular-surface irradiation in the depth of the structure to be examined is detected in a defocused way and the volume element located there is tomographed.