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发明名称
Flächenselektive chemische Dampfphasenausscheidung.
摘要
申请公布号
DE69006839(T2)
申请公布日期
1994.08.11
申请号
DE19906006839T
申请日期
1990.11.22
申请人
CVD INC., WOBURN, MASS., US
发明人
KEELEY, JOSEPH T., WOBURN, MASSACHUSETTS 01801, US;GOELA, JITENDRA SINGH, ANDOVER, MASSACHUSETTS 01810, US;PICKERING, MICHAEL, DRACUT, MASSACHUSETTS 01826, US;TAYLOR, RAYMOND L., SAUGUS, MASSACHUSETTS 01906, US
分类号
C23C16/44;C23C16/04;C23C16/455;C23C16/458;(IPC1-7):C23C16/04
主分类号
C23C16/44
代理机构
代理人
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地址
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