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经营范围
发明名称
A multi-electron-beam pattern drawing apparatus.
摘要
申请公布号
EP0289279(B1)
申请公布日期
1994.08.10
申请号
EP19880303782
申请日期
1988.04.27
申请人
CANON KABUSHIKI KAISHA
发明人
OKUNUKI, MASAHIKO;SHIMODA, ISAMU;MIYAWAKI, MAMORU;TSUKAMOTO, TAKEO;SUZUKI, AKIRA;KANEKO, TETSUYA;TAKEDA, TOSHIHIKO;SEKI, MITSUAKI
分类号
H01J37/30;H01J37/317;(IPC1-7):H01J37/30
主分类号
H01J37/30
代理机构
代理人
主权项
地址
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