| 发明名称 |
Impurity free reference grid for use charged partiole beam spectroscopes |
| 摘要 |
A reference grid for use in charged particle beam spectroscopes in analyzing an impurity contained in a target sample, which includes a grid composed of a material free of the impurity.
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| 申请公布号 |
US5336895(A) |
申请公布日期 |
1994.08.09 |
| 申请号 |
US19920903467 |
申请日期 |
1992.06.25 |
| 申请人 |
SHARP KABUSHIKI KAISHA |
发明人 |
NAKANO, AKIHIKO |
| 分类号 |
H01J49/06;H01J37/02;H01J37/20;H01J37/252;H01J49/02;(IPC1-7):G01N23/00 |
主分类号 |
H01J49/06 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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