发明名称 |
Curable composition and process for producing shadow mask using the same |
摘要 |
A curable composition comprising the following components (a), (b), (c) and (d) and/or (e): (a) a compound having one carboxyl group and one (meth)acryloyl group in the molecule, (b) a compound having two or more (meth)acryloyl groups in the molecule, (c) a levelling agent, and (d) a chain transfer agent and/or (e) a tertiary amine type photoinitiator; and a process for producing a shadow mask, comprising two etching steps, wherein the above curable composition is used as a secondary etching resist material.
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申请公布号 |
US5336574(A) |
申请公布日期 |
1994.08.09 |
申请号 |
US19920955206 |
申请日期 |
1992.10.02 |
申请人 |
TOAGOSEI CHEMICAL INDUSTRY CO., LTD. |
发明人 |
IGARASHI, ICHIRO;SASAKI, HIROSHI;JITSUMATSU, TETSUJI;OTA, HIROYUKI;SATO, MASANOBU;NISHIMUTA, HIROFUMI |
分类号 |
C23F1/02;G03F7/027;H01J9/14;(IPC1-7):G03C5/00 |
主分类号 |
C23F1/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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