发明名称 PRODUCTION OF HIGH ALPHA-TYPE HIGHLY PURE SILICON NITRIDE POWDER
摘要 PURPOSE:To simply and surely obtain a high alpha-type highly pure silicon nitride powder. CONSTITUTION:The method for producing silicon nitride powder having an alpha-form content of >=90wt.% by directly reacting metallic silicon powder with nitrogen in the presence of calcium oxide comprises using metallic silicon powder having an metal impurity content of 5-20mum, an oxygen content of 0.1-0.4wt.% and an average particle diameter of 5-20mum as the metallic silicon powder and further adding calcium oxide in an amount of 0.2-0.7 pts.wt. per 100 pts.wt. of the metallic silicon powder.
申请公布号 JPH06219715(A) 申请公布日期 1994.08.09
申请号 JP19930034212 申请日期 1993.01.29
申请人 SHIN ETSU CHEM CO LTD 发明人 KUWABARA HARUYOSHI;OTSUKA AKIO;MAKI YASUYUKI;SHINDO TOSHIHIKO
分类号 C01B21/068;C01C1/04 主分类号 C01B21/068
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