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发明名称
SPUTTERING TARGET STOCK AND ITS PRODUCTION
摘要
申请公布号
JPH06220625(A)
申请公布日期
1994.08.09
申请号
JP19930013072
申请日期
1993.01.29
申请人
TOKYO TUNGSTEN CO LTD
发明人
KURODA MICHIO
分类号
B22F3/24;C23C14/34;(IPC1-7):C23C14/34
主分类号
B22F3/24
代理机构
代理人
主权项
地址
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