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发明名称
DEVICE FOR LIQUID PHASE EPITAXYAL GROWTH
摘要
申请公布号
JPH06219892(A)
申请公布日期
1994.08.09
申请号
JP19930009061
申请日期
1993.01.22
申请人
SHARP CORP
发明人
UMEDA HIROSHI
分类号
C30B19/06;H01L21/208;(IPC1-7):C30B19/06
主分类号
C30B19/06
代理机构
代理人
主权项
地址
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