PLASMA PROCESSING APPARATUS,申请号JP19930004150-传众专利搜索

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发明名称	PLASMA PROCESSING APPARATUS
摘要
申请公布号	JPH06216073(A)	申请公布日期	1994.08.05
申请号	JP19930004150	申请日期	1993.01.13
申请人	KOBE STEEL LTD	发明人	KINOSHITA TAKASHI;NOZAWA TOSHIHISA;NISHIZUKA TETSUYA
分类号	C23C14/34;C23C16/50;C23C16/511;C23F4/00;H01L21/205;H01L21/302;H01L21/3065;(IPC1-7):H01L21/302	主分类号	C23C14/34
代理机构		代理人
主权项
地址

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