| 摘要 |
PURPOSE: To provide a capacitive pressure sensor capable of preventing contamination of an electrode and performance drop by a fluid to be detected, having stiff structure, high durability, high accuracy, simple structure, long life, and capable of assembling at low cost. CONSTITUTION: A pressure sensor is constituted so that a flexible diaphragm 110, a spacer 112, and a stiff substrate 114 arranged facingly each other within a housing 40 are together elastically energized with a spring cramp 138. An electrode arranged on the facing surface of the diaphragm and the substrate gives a signal showing the pressure of fluid which displaces the central part of the diaphragm. During operation, in order to vary and control the pressure of fuel supplied to an engine according to the operation load or condition of the engine, the velocity of a fuel pump is controlled through the sensor and a control circuit. |
