发明名称 ELECTRIC MACHINE DISPLACING DEVICE
摘要 PURPOSE: To provide an electromechanical displacer which can displace a displacement element accurately without being influenced by temperature change, processing accuracy, abrasion, etc. CONSTITUTION: An actuator 83 coupled with a holder 90 is provided with a first clamp member A and a second clamp member B which can alternately clamp a displacement element 4, receiving mechanical preliminary tension FK, and piezoelectric transfer elements 69' and 69" which can change the distance between these clamp members. Then, in a separated state of the second clamp member from the displacement member, the first clamp member clamps the displacement member 45 by the mechanical preliminary tension FK, and next under condition that the mechanical preliminary tension is shifted to the second clamp member by operating the piezoelectric clamp element so as to separate the first clamp member from the displacement element 45, the second clamp member clamps the displacement member, whereby displacement element can be displaced to the holder.
申请公布号 JPH06217562(A) 申请公布日期 1994.08.05
申请号 JP19930242851 申请日期 1993.09.29
申请人 PHILIPS ELECTRON NV 发明人 ARUBERUTO FUITSUSUHERU;MARINUSU PIETERU KOSUTERU;YOHANESU UIRUHERUMUSU UIIKANPU
分类号 B23Q5/28;G05D3/00;H01L41/09;H02N2/00 主分类号 B23Q5/28
代理机构 代理人
主权项
地址