| 摘要 |
PURPOSE:To enable easy focusing only with a scan for selecting a predetermined image from surface images by making a scan so that the scan is gradient toward a depth direction by a focus-type probe with respect to a subject having an inspecting surface at a predetermined depth and the scan is linear or gradient viewed from a flat plane. CONSTITUTION:A probe 3 scans a subject 17 on an XY plane wherein it is fed by pitches in a Y-direction after being scanned by one line in an X-direction to scan in the Xdirection reversely to the above, that is, by reciprocating scanning in the X-direction. With this scan a peak value is detected per each measurement point assigned with a predetermined pitch by a peak detection circuit 5, and the peak value is latched in to a microprocessor MPU 9 in a form of a digital value. The MPU 9 sequentially stores the peak value data into a memory 10 corresponding to each measurement point. In addition for measurement for focusing, a scan in a Z-direction is also performed according to a one line scan of the X-direction or the Ydirection in an XY-plane scan to perform gradient scan gradient in a depth direction (Z-direction). |
