| 摘要 |
PURPOSE:To furnish a detecting apparatus of diffracted electrons which enables execution of an accurate and easy operation for selecting a diffraction spot by expanding the range of observation of a fluorescent screen and increases a speed of scanning of electron beams by enabling consecutive detection of brightness signals of the diffraction spot. CONSTITUTION:In a detecting apparatus of diffracted electrons which applies electron beams to a sample and detects the electron beams diffracted by this sample, a fluorescent screen 1 converting the diffracted electron beams into light signals, a TV camera 5 picking up the image of the fluorescent screen 1, a photoelectric converter 2 detecting the brightness on the fluorescent screen 1, and an X-Y stage 4 shifting the position of detection of the fluorescent screen 1 detected by the photoelectric converter 2, are provided. Moreover, a position specifying means 6 which specifies the position on the fluorescent screen 1 on the basis of an image signal of the TV camera 5 and a position control means 7 which controls the X-Y stage 4 on the basis of coordinate data specified by the position specifying means 6 are provided. |
