发明名称 SEMICONDUCTOR INTEGRATED CIRCUIT
摘要 PURPOSE: To provide a SRAM memory structure, wherein two load resistors used in SRAM are balanced with each other and have a relatively high resistance value. CONSTITUTION: This semiconductor integrated circuit consists of a substrate 1, a plurality of semiconductors 13, 15 formed on the substrate 1, a plurality of load resistors 23 containing silicon, a dielectric layer 21 formed between the load resistors 23 and the substrate 1, a first dielectric layer 24 formed on the plurality of the load resistors 23, and a metallic layer 27 formed on the first dielectric layer 24. The metallic layer 27 is formed such that the surface area of the load resistors 23 is almost entirely covered. With this constitution, the two (left and right in the figure) load resistors 23 are balanced with each other at a high resistance value.
申请公布号 JPH06216347(A) 申请公布日期 1994.08.05
申请号 JP19930312811 申请日期 1993.11.19
申请人 AMERICAN TELEPH & TELEGR CO <ATT> 发明人 MIN RAN CHIEN;WAANAA JIYUENRIN
分类号 H01L27/04;H01L21/822;H01L21/8244;H01L27/11 主分类号 H01L27/04
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