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发明名称
DEVICE AND METHOD FOR MEASURING FILM THICKNESS
摘要
申请公布号
JPH06216210(A)
申请公布日期
1994.08.05
申请号
JP19930006017
申请日期
1993.01.18
申请人
MITSUBISHI ELECTRIC CORP
发明人
ONO AKIRA;KATO YUICHI
分类号
G01B21/08;H01L21/66;(IPC1-7):H01L21/66
主分类号
G01B21/08
代理机构
代理人
主权项
地址
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