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发明名称
THIN-FILM FORMING METHOD
摘要
申请公布号
JPH06216109(A)
申请公布日期
1994.08.05
申请号
JP19930021642
申请日期
1993.01.18
申请人
CANON INC
发明人
HOSHI JUNICHI
分类号
C23F1/08;H01L21/306;(IPC1-7):H01L21/306
主分类号
C23F1/08
代理机构
代理人
主权项
地址
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