| 摘要 |
<p>PURPOSE: To measure the current distribution of an integrated circuit with high time resolution by placing a ferromagnetic film into the magnetic field formed by the current in an integrated circuit, feeding electrical pulses to the integrated circuit, and measuring the magnetic polarization rotation of a laser beam reflected on the film. CONSTITUTION: A light beam from a linearly polarized laser source 14 is projected to a magneto-optical film (magneto-optical material) 28 placed into the magnetic field of the conductor of an integrated circuit 29, and a current wave-form for testing the circuit 29 is fed to the circuit 29 via lead wires 41, 42. The light beam fed to the film 28 is reflected on its lower face, the polarization rotation caused by the change of the refraction factor by the magnetic field of the conductor of the circuit 29 is generated by the light beam and goes out as shown by an arrow 54. The polarization rotation signal is measured by a measuring means combined with a beam turnout 56, photodiodes 59, 60, and a differential amplifier 64, and the current distribution of the circuit 29 is detected.</p> |
