| 摘要 |
<p>PURPOSE:To provide the polarization apparatus of a piezoelectric element, in which the consumption of a fluorine-base inert liquid to be used as a polariza tion liquid can be reduced and an operating efficiency is satisfactory and a temperature control is easy. CONSTITUTION:The title polarization apparatus is equipped with an intake chamber 1, polarization tank 2, drying chamber 3 and take-out chamber 4; and doors, which can be opened and closed, are provided between respective chambers. A polarization liquid 13 composed of fluorine-base inert liquid is stored in the polarization tank 2, and the drying chamber 3 is provided with a drying means for drying the polarization liquid 13 attached on a piezoelectric element A. A recovery means is connected with the intake chamber 1 and take-out chamber 4 to recover the vapor of the inert liquid entering these chambers and to prevent the vapor from leaking out to the air.</p> |
