| 摘要 |
<p>PURPOSE:To provide a wafer carrier in which semiconductor wafers are set without inclination. CONSTITUTION:In a wafer carrier containing a plurality of semiconductor wafers 3A, 3E and 3F vertically stacked at regular intervals, the sectional shape of grooves 4 of sidewalls 1 for holding the semiconductor wafers 3A, 3E and 3F is a symmetrical with respect to the center line C of the horizontal direction, and inclination does not occur in the semiconductor wafers 3A, 3E and 3F even if the semiconductor wafers 3A, 3E and 3F are moved from the optimum position in all directions.</p> |
