| 摘要 |
PURPOSE:To remove the residual polarization liquid a piezoelectric element by a simple process, by coating the periphery of the piezoelectric element before a polarization process with a material having an effect of repelling the polarization liquid. CONSTITUTION:A repellent material 9 is applied to the surface of piezoelectric elements A before a polarization process and of a holder jig B in the form of a film, and a predetermined number of piezoelectric elements A are held by the holder jig B. Then, the holder jig B holding the piezoelectric elements A are placed in a polarization bath 1. In the polarization bath 1, the piezoelectric elements are dipped in a polarization liquid 10, the surface and rear of the piezoelectric elements A are pinched by electrodes 12 and 12, and a high voltage is applied to perform the polarization process. Then, after introducing the holder jig B holding the piezoelectric elements A after the polarization into a chamber 2 for removing the residual liquid, the polarization liquid 10 adhering to the piezoelectric elements A and the holder jig B is blown off by a blower 15. Thereafter, the repellent material applied on the periphery of the piezoelectric elements is removed, but no special removal process needs to be provided since the polarization process is performed at the stage of the mother board of the piezoelectric elements. |
