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发明名称
AUTOMATIC TRANSFERRING APPARATUS AND AUTOMATIC TRANSFERRING METHOD FOR ARTICLE BY USE OF SAME
摘要
申请公布号
JPH06216216(A)
申请公布日期
1994.08.05
申请号
JP19930005175
申请日期
1993.01.14
申请人
SONY CORP
发明人
MATSUO TOSHIFUMI
分类号
H01L21/02;H01L21/302;H01L21/304;H01L21/3065;H01L21/677;H01L21/68;(IPC1-7):H01L21/68
主分类号
H01L21/02
代理机构
代理人
主权项
地址
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