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发明名称
ROTARY-TYPE WASHING DRYING DEVICE FOR BATCH-TYPE TREATING WAFER
摘要
申请公布号
JPH06216104(A)
申请公布日期
1994.08.05
申请号
JP19930023509
申请日期
1993.01.20
申请人
SONY CORP
发明人
MINAMI MASAKI
分类号
F26B11/08;H01L21/304;(IPC1-7):H01L21/304
主分类号
F26B11/08
代理机构
代理人
主权项
地址
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