JIG FOR HOLDING SEMICONDUCTOR WAFER

摘要

PURPOSE:To make it possible to ensure a uniform thermal conductivity while preventing contamination of a heavy metal. CONSTITUTION:In a jig for holding a semiconductor wafer used in a wafer chuck for holding the semiconductor wafer of an alloy 8 containing copper, a chrome carbide coating 9 for controlling a precipitation of the copper is applied to at least the holding surface of the semiconductor wafer of the alloy 8, and diffusion of a heavy metal is prevented.